Twelve Five China will focus on developing solar cell production equipment

1. Polysilicon and single-crystal silicon growth, cutting, and cleaning equipment industrialization Polysilicon growth equipment: Breakthrough thermal sub-control technology and directional solidification technology to realize the research, development, and industrialization of silicon ingot furnaces with a charging capacity of at least tons and above. And achieve a 75% yield.

Single crystal silicon growth equipment: Breakthrough single crystal growth automatic control technology, to achieve the industrialization of 8 inch (156 mm × 156 mm silicon wafer) size automatic single crystal furnace.

Cutting equipment: Break through key technologies such as tension control software technology, water cooling gas sealing technology, and mortar temperature closed-loop control technology to ensure that it can meet the needs of large-scale production of solar wafers. The cutting wafer size is 8 inches, and the cutting accuracy is better than 10 microns. Industrialization of solar wafer multi-wire saws below 180 microns.

Cleaning equipment: breakthrough key technologies such as temperature control technology of tank body, solution circulation technology, and large-stroke linear transmission technology to improve the consistency of product quality, realize the industrialization of solar crystal silicon cleaning and velvet equipment with a fragmentation rate of less than 0.3 ,, and promote crystalline silicon Solar cell conversion efficiency.

2. Key equipments such as diffusion furnaces and plasma-enhanced chemical vapor deposition (PECVD) equipments for the development and industrialization of fully-automated crystalline silicon solar cell wafer production lines have broken through the automation technology of logistic transmission between stand-alone automation and production line equipment, and realized the entire line automation. integrated.

Focus on breakthrough in automatic image alignment technology, flexible transmission technology, high-precision printing technology, high-speed high-precision alignment technology, test sorting technology, intelligent control and system integration technology, and further improve the printing, drying and testing of solar cell electrodes. Speed, industrialization of fully automated solar printing line equipment that achieves a capacity of 1,440 pieces/hour or more and a chip rate of less than 0.5%.

3. Thin film solar energy production equipment Silicon-based thin film solar cell equipment: Focus on improving the uniformity of large-area deposition, further improve the stability of equipment operation, appropriately increase the degree of automation, and increase production efficiency.

Cadmium telluride (CdTe) Thin Film Solar Cell Equipment: Breakthrough the technical difficulties of vacuum coating equipment, research and develop a new sublimation source structure, further improve the temperature uniformity, and develop a drive system under high temperature and vacuum environment.

CIGS thin-film solar cell equipment: breakthroughs in technical difficulties such as vacuum coating equipment, material sputtering, and selenization technology to realize precise control of elemental ratio, ensure uniformity of large-area deposition, increase production efficiency, and reduce manufacturing cost. CIGS complete line equipment integration with over 0.7 square meters and battery conversion efficiency of over 14%.